REG Metals supplies Lithium Oxide Sputtering Targets (Li₂O Targets) for thin-film deposition, semiconductor research, solid-state batteries, electrochemical devices, optical coatings, lithium-ion battery research, and advanced materials development.
Lithium oxide is a highly reactive alkali-metal oxide that can be used as a lithium-containing deposition source in specialized PVD and sputtering processes. Li₂O targets are available in high-purity compositions and can be produced or sourced in round, rectangular, square, and custom geometries.
Because lithium oxide is moisture-sensitive and chemically reactive, target handling, storage, bonding, sputtering power, atmosphere, and deposition conditions should be carefully controlled. Lithium loss or changes in film stoichiometry can occur during sputtering, so process-specific requirements should be considered when selecting a target.
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